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SAGA Light Source
SAGA Light Source Imaging Lab.

Publication

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  • Pt-Ti-O gate silicon-metal-insulator-semiconductor field-effect transistor hydrogen gas sensors in harsh environments
JAPANESE JOURNAL OF APPLIED PHYSICS 55, 6 (2016)
Pt-Ti-O gate silicon-metal-insulator-semiconductor field-effect transistor hydrogen gas sensors in harsh environments

Author

Toshiyuki Usagawa,Kazuhiro Ueda,Akira Nambu,Akio Yoneyama,Yota Kikuchi,Atsushi Watanabe

Category

Original article